Latest News

Welcome to our company presentation!

2013-05-24:

All those interested to get to know more about our company are warmly invited to our company presentation on the 44th Plenary Meeting of the German Flat Panel Display Forum (DFF) “Application and System Integration, value-added design” hosted by EuropTec GmbH in Goslar on 6th June 2013.

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CHUCKING MODULE CM 3000

Electrostatic chucking/de-chucking module

  • Integrable into other systems, e.g. process tools, due to standardized interfaces
  • Existing, standardized systems can be used for processing thin and ultra-thin substrates/wafers without any system- or process-related modifications

Technical Data

Machine Dimensions L x W x H: 540 x 330 x 640 mm
Weight 20 kg