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Welcome to our company presentation!

2013-05-24:

All those interested to get to know more about our company are warmly invited to our company presentation on the 44th Plenary Meeting of the German Flat Panel Display Forum (DFF) “Application and System Integration, value-added design” hosted by EuropTec GmbH in Goslar on 6th June 2013.

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LITHO HT T-ESC®

(MEMBER OF THE HT T-ESC® FAMILY)

Fluid residues between substrate and carrier are avoided. In addition to the benefits offered by the standard HT T-ESC®, the Litho HT T-ESC® is an adapted solution fostering thin wafer support during the whole lithography process.

Typical Applications

  • Photoresist coating
  • EBR
  • Baking
  • Exposure
  • Developing

Moreover, the following applications are supported as well

  • Spin cleaning
  • Spin etching

Qualified Equipment

  • SUSS ACS300Plus
  • SUSS MA200Compact
  • SSEC3300
  • Various single-wafer cleaners