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Welcome to our company presentation!

2013-05-24:

All those interested to get to know more about our company are warmly invited to our company presentation on the 44th Plenary Meeting of the German Flat Panel Display Forum (DFF) “Application and System Integration, value-added design” hosted by EuropTec GmbH in Goslar on 6th June 2013.

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Measurement Controller

  • is a software-driven high-voltage device to perform, control and optimize an electrostatic chucking
  • measures and adjusts parameters in real time
  • supports unipolar and bipolar electrostatic clamping
  • is able to supply power and to control several electrostatic chucks (e-chucks) simultaneously
  • small-sized, ergonomically designed, easy to integrate in process tools due to various standardized interfaces