Latest News

Welcome to our company presentation!

2013-05-24:

All those interested to get to know more about our company are warmly invited to our company presentation on the 44th Plenary Meeting of the German Flat Panel Display Forum (DFF) “Application and System Integration, value-added design” hosted by EuropTec GmbH in Goslar on 6th June 2013.

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PLASMA-RESISTANT HT T-ESC®

(MEMBER OF THE HT T-ESC® FAMILY)

Enables longer processing times for clamped thin wafers in plasma processes thanks to adapted and optimized edge protection.

Typical Applications

  • Typical Applications
  • Dry etching (DRIE/RIE)
  • Metal deposition

Furthermore, the same applications supported by the standard HT Carrier are also supported by the PR HT T-ESC®.

Qualified Equipment

  • STS Pegasus
  • Varian E500

Option: Adapter PR HT T-ESC®

Enables in addition to the benefits of PR HT T-ESC® also the possibility to handle and process smaller-sized substrates on bigger-sized tools, e.g. 6” sample on 8” tool.

Plasma-Resistant HT T-ESC®
Adapter PR HT T-ESC®