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Welcome to our company presentation!

2013-05-24:

All those interested to get to know more about our company are warmly invited to our company presentation on the 44th Plenary Meeting of the German Flat Panel Display Forum (DFF) “Application and System Integration, value-added design” hosted by EuropTec GmbH in Goslar on 6th June 2013.

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SEPARATE COMPONENTS (ACCESSORIES FOR MCU 3000)

ADJUSTMENT SAMPLE

Setting tool

  • Supports a substrate/wafer position
  • Alignment for optimal contact by needles
  • Indispensable for all handling on MCU 3000
    in managing the “Daily Check”

SIDE TABLE

Manual alignment tool

  • Supports the pre-centering of a substrate/wafer
    before it is picked up with the appropriate racket
    and subsequent transport
    and is placed on a carrier (T-ESC®)
  • Serves as a “clipboard” for substrates/wafer,
    carrier, or already chucked carrier-wafer package

Additional Information

The transfer of substrates or wafers onto the
Side Table can also be performed with a pair of
tweezers or vacuum tweezers.

WORKING PLATE

Operational/functional disk

  • On which the actual process of chucking takes
    place, i.e. the thin or ultra-thin substrate/wafer
    is fixed or removed on a carrier (T-ESC®) by means
    of electrostatic clamping force
  • Enables up- or downgrades to another size:
    • upgrade from 4” to 6”, 6” to 8”, 8” to 12”
    • downgrade from 6” to 4”, 8” to 6”, 12” to 8”
  • Easy mounting by customer