protec carrier systems
machinery
(MEMBER OF THE T-ESC® FAMILY)
Glass Fiber T-ESC®
The Glassfiber Transfer ElectroStatic Carrier (Glass Fiber T-ESC®) enables temporary bonded wafer thinning without the need of adhesives, starting from a thick wafer grinding down to ultra-thin wafer thickness. This mobile rigid wafer support helps to generate high yield even when going to the ultra-thin wafer thicknesses. Furthermore, this mobile electrostatic carrier can be used in process applications such as handling and probing.
Glass Fiber T-ESC®
Typical Applications
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Compatibility with existing handling systems (transport cassettes, vacuum, Bernoulli or mechanical end effectors etc.)
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High flatness
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Reusable
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Sizes from 2" to 12", customized shapes and features possible
Recommended Processes:
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Grinding
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Handling
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Probing
Grinding
Grinding is a substrate thinning process, where material is mechanically removed.
During the wafer processing the wafer needs to be transferred back and forth from the cassettes to the tools and also inside the tools from one station to the other. For fragile substrates this is already challenging, because they tend to break or get cracks, which can lead to future breakage. Also bowing of thinned substrates brings a lot of trouble for all tooling because they are usually not designed for this very special operation. Temporary bonding with our T-ESC® is a great help here as the processing tools only see a standard wafer and trouble with handling. Therefore, the wafer breakage is eliminated.
Various probing methods exist. They are used to check the substrate's or device's functionality. E.g. there are optical inspection or electrical probing.