protec carrier systems
machinery
Polymer T-ESC®
Handling
Spin Etching
Probing
Litho HT T-ESC®
(Single Wafer) Spin Etching
Handling
Lithography
Spin Coating
EBR
Baking
Exposure
Resist Developing
Resist Stripping
Slide-Off De-Bonding
HT T-ESC®
Handling
Electro Plating
Annealing
DIE Handling
MCU 3000
Three Basic Sizes:
3"/4”/6”, 6”/8”, 8”/12” and
customized versions on request
Weight:
20 kg
Process Media:
Power supply
N2 (CDA/compressed air),
Vacuum
Machine Dimensions:
L x W x H:
621 x 430 x 330 mm
Selectable Chucking Voltage:
0 to 3kV
ACU 3000
Weight:
1000 kg
Process Media:
Power supply 100–240 V
Pneumatics N2 or CDA
Vacuum
Communication:
SEMI Standard SECS/GEM
others on request
Machine Dimensions:
L x W x H: 1440 x 1485 x 2092 mm
Weight:
1000 kg
Clean Room Class: 100, 10
PR HT T-ESC®
Electro Plating
Handling
Ion Implantation
CVD/PECVD
PVD/Sputter
Plasma Clean / Ashing
DRIE / RIE
Polymer Electrostatic Chuck
Optical Bonding
Handling
Substrate Bending
Ceramic Electrostatic Chuck
Handling
PVD/Sputter
PECVD
OVPD
CVD
Plasma Cleaning / Ashing
DRIE/RIE
Ion Beam Etching/ Trimming
Ion Implantation
Racket Bipolar
Optional Media:
N2 or CDA, Vacuum
Process Media:
Power supply 9V battery
Sizes:
4”, 6”, 8”, 12”, other shapes on request
Electrostatic Chuck Power Supplies
H³ Electrostatic Chuck Power Supply:
Output voltage range: 0 to ± 3 kV (6kV)
Output voltage accuracy: <1 %
Output current: <1 mA
Output current accuracy: <1% with a resolution of 1nA
Input voltage: 24 V DC / 100-240V AC rack version
Operating temperature range: 10°C- 40°C
Unipolar Electrostatic Chuck Power Supply:
Output voltage range: 0 to ±3 kV (3kV)
Output voltage accuracy: <1 %
Output current: <1 mA
Output current accuracy: <1% with a resolution of 1pA
Input voltage: 24 V DC / 100-240V AC rack version
Operating temperature range: 10°C- 40°C
Vacuum-Suited Battery-Powered
Electrostatic Chuck Power Supply:
Output voltage range: 0 to ± 2 (4kV) or ± 2.7 kV (5.4kV)
Output voltage accuracy: <1 %
Output current: <1 mA
Output current accuracy: <1% with a resolution of 1nA
Operating temperature range: 10°C- 85°C
Glass Fiber T-ESC®
Grinding
Handling
Probing