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Electrostatic Chuck Power Supplies

 

ProTec®'s electrostatic chuck power supplies make it possible to accurately control the fixation of substrates on electrostatic chucks during the manufacturing process. They allow to regulate the voltage and the output current of e-chucks and makes precise measurements extremely quick and reliable.

Variety: The electrostatic chuck power supplies can be divided into three basic categories with different models. There are single, two-voltage and battery-powered electrostatic chuck power supplies that are suited for applications in vacuum. Each has different models starting from built-in units to rack type housing.

Transparency: With the properties of the power supplies you can easily detect if a wafer or substrate is placed on an electrostatic chuck and determine the impact of the process on the electrostatic chuck and the substrate.

Accuracy: Since the ultra-sensitive measurement data is constantly communicated by the electrostatic chuck power supply, you gain access to critical process parameters and can directly see the process derivations. This allows you to make real-time adjustments, that significantly enhance your yield.

Customization: The electrostatic chuck power supplies can be individually customized to your needs. The voltage range, communication protocol and other features can be modified on request.

Electrostatic Chuck Power Supplies

ProTec®'s Electrostatic Chuck Power Supply Series

 

H³ Electrostatic Chuck Power Supply

 

Features:

  • Bipolar configuration (two synchronized high voltage channels)

  • Output voltage reversal per channel

  • Adjustable voltage range

  • Voltage and current measuring and monitoring

  • Compact size

  • RoHS

  • Host communication through ModBus TCP/IP or RS232

  • Fixable H³ housing to DIN rail or rack

 

Options:

  • Customized OEM version

  • Rack version

  • Built-in RF filtering

  • Bias offset

 

 

Unipolar Electrostatic Chuck Power Supply

 

Features:

  • Unipolar configuration (single high voltage channel)

  • Output voltage is reversible per channel

  • Adjustable voltage range

  • Voltage and current measuring and monitoring

  • Compact size

  • RoHS

  • Host communication through RS232

 

Options:

  • Customized OEM version

  • Rack version

 

 

Vacuum-Suited Battery-Powered Electrostatic Chuck Power Supply

 

Features:

  • Bipolar configuration (two synchronized high voltage channels)

  • Output voltage reversal per channel

  • Adjustable voltage range

  • Voltage and current measuring and monitoring

  • Compact size

  • RoHS

  • Vacuum- and atmosphere-suited

  • Battery-powered, even in a vacuum environment

  • Long working hours

  • Powering of one or multiple electrostatic chucks

  • High temperature resistance

  • Rechargeable

 

Options:

  • Customized OEM version

  • Bipolar configuration with two independently programmable high voltage channels

Technical Data

H³ Electrostatic Chuck Power Supply:

Output voltage range: 0 to ± 3 kV (6kV)

Output voltage accuracy: <1 %

Output current: <1 mA

Output current accuracy: <1% with a resolution of 1nA

Input voltage: 24 V DC / 100-240V AC rack version

Operating temperature range: 10°C- 40°C

Unipolar Electrostatic Chuck Power Supply:

Output voltage range: 0 to ±3 kV (3kV)

Output voltage accuracy: <1 %

Output current: <1 mA

Output current accuracy: <1% with a resolution of 1pA

Input voltage: 24 V DC / 100-240V AC rack version

Operating temperature range: 10°C- 40°C

Vacuum-Suited Battery-Powered

Electrostatic Chuck Power Supply:

Output voltage range: 0 to ± 2 (4kV) or ± 2.7 kV (5.4kV)

Output voltage accuracy: <1 %

Output current: <1 mA

Output current accuracy: <1% with a resolution of 1nA

Operating temperature range: 10°C- 85°C