Machinery

Racket bipolar 

The ProTec®(TOR) Racket bipolar is an ease to use tool for transferring fragile substrates such as ultra thin wafers, glass or conductive or non-conductive foils. The chucking force generated by the Racket is uniform and therefore stressless for the substrate, which avoids cracking or damaging the fragile substrate . Operator is able to use the Racket with one hand only, furthermore optical alignment features can be implemented so that the pickup of the thin wafer can be done more easily. The ProTec®(TOR) Racket bipolar is powered by a 9V battery therefore the operator is free to move with the attached substrate. Besides general handling operation the ProTec®(TOR) Racket bipolar can also be used in applications such as de-taping or optical inspection.

Racket bipolar 

Typical Applications

  • Generates uniform electrostatic force over the chucking surface

  • Powered by an integrated battery for wireless and tubeless handling

  • Process Media: Power supply 9V battery

  • Optional Media: N2 or CDA, Vacuum

  • Sizes: 4”, 6”, 8”, 12”, other shapes on request

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Technical Data

Optional Media:

N2 or CDA, Vacuum

Process Media:

Power supply 9V battery

Sizes:

4”, 6”, 8”, 12”, other shapes on request