Menu

protec carrier systems 

machinery 

Machinery

Measurement Controller 

ProTec® offers a wide range of High Voltage power supplies, our High Voltage Measurement Controllers (HV MC) for dedicated chucking tasks. The different versions start from built-in units to Rack type of housing to fully customized solutions for inline and mobile applications. ProTec®´s HV MC´s are manufactured to the specific customer needs, which includes the voltage range and also the measurement features.
With the ultra sensitive current and voltage measurement included for each high voltage port exact data can be generated to enhance the yield of the processing step. It is not only possible to detect if a substrate is placed on the chuck, furthermore process related impact on the ESC or T-ESC® can be monitored giving exceptional process control.

The Measurement Controllers can be separated in two basic types, one for stationary applications and the other for mobile applications where the controller is powered by a specifically designed rechargeable battery solution, also suitable for vacuum processing.

Measurement Controller 

Typical Applications

Stationary power supply High Voltage Measurement Controller

  • Adjustable voltage range ± 2 kV, ± 3 kV, 0 to 3 kV others on request

  • Small form factor

  • Powering one or several ESC´s

  • Diverse measuring and monitoring functions, e.g. leakage current and voltage monitoring, substrate detection

  • Stand alone and built-in version with data interface

  • Advanced de-chucking feature

Battery powered High Voltage Measurement Controller Unit

  • Vacuum and atmosphere suited

  • Small form factor

  • High temperature resistant

  • Fully customized solutions possible

  • Diverse measuring and monitoring functions, e.g. leakage current and voltage monitoring, data read function

  • Battery powered even in vacuum environment

  • Long working hours

  • Rechargeable

  • Powering one or several ESC´s

  • Adjustable voltage range ± 2 kV, others on request

  • Touchless charging and discharging feature on request

Technical Data

Stationary power supply - Adjustable voltage range:

± 2 kV, ± 3 kV, 0 to 3 kV
others on request

Battery powered - Adjustable voltage range:

± 2 kV, others on request