SEMICONDUCTOR
GLASS FIBER T-ESC®
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SEMICONDUCTOR
POLYMER T-ESC®
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Semiconductor
LITHO HT T-ESC®
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SEMICONDUCTOR
HT T-ESC®
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SEMICONDUCTOR
PR HT T-ESC®
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Semiconductor
The T-ESC® Technology by ProTec® offers safe and easy handling as well as processing of fragile, thin and ultra-thin substrates (thinner 50 µm), e.g. GaAs, InP, LN, LT, thin silicon, thin MEMS wafer and many more. The basic concept behind this adhesive free temporary bonding technology involves using electrostatic force to chuck thin and ultra-thin wafers onto mobile rigid Carriers (T-ESC®). Such wafer-Carrier packages can be handled and processed like wafers of standard thickness.
Therefore, existing standard cassettes, handling tools, and fabrication equipment can be used without modifications. Additional effect: the warping and bowing of thin and ultra-thin substrates are eliminated, which is highly welcome. All our Carriers are available in standard sizes from 2" to 12" and additionally in customized shapes suited to the intended application.
Glass fiber T-ESC®
Grinding
Handling
Probing
HT T-ESC®
Handling
Electro Plating
Annealing
DIE Handling
Litho HT T-ESC®
(Single Wafer) Spin Etching
Handling
Lithography
Spin Coating
EBR
Baking
Exposure
Resist Developing
Resist Stripping
Slide-Off De-Bonding
Polymer T-ESC®
Handling
Spin Etching
Probing
PR HT T-ESC®
Electro Plating
Handling
Ion Implantation
CVD/PECVD
PVD/Sputter
Plasma Clean / Ashing
DRIE / RIE
Our Machines
ACU 3000
A fully automated electrostatic chucking/de-chucking unit with up to 120 wafers and/or T-ESC® packages per hour, guarantying an highest yield during handling and many diagnostics features.
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MCU 3000
A manual chucking / de-chucking unit of thin and ultra-thin substrates on carriers T-ESC® for flexible sizes from 4”/6” to 8”/12” with a high flexible mobile handling tool and diagnostic features.
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