Listview for the terms

3D IC
Three-dimensional integrated circuit
ACU
Automated Chucking Unit
CDA
Clean Dry Air
CVD
Chemical Vapor Deposition
DRIE
Deep Reactive Ion Etching
EBR
Edge Bead Removal
ECPS
Electrostatic Chuck Power Supply
ESC
Electrostatic Chuck
GaAs
Gallium Arsenide
HT
High Temperature
InP
Indium Phosphide
LN
Lithium Niobate
LT
Lithium Tantalate
MCU
Manual Chucking Unit
MEMS
Microelectromechanical systems
N2
Nitrogen
OLED
Organic Light Emitting Diode
OVPD
Organic Vapor Phase Deposition
PCS
ProTec Carrier Systems
PECVD
Plasma Enhanced Chemical Vapor Deposition
PR
Plasma Resistant
PVD
Physical Vapor Deposition
RIE
Reactive Ion Etching
SiC
Silicon Carbide
T-ESC
Transferable ElectroStatic Carrier